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ChampiAn
- Analysis
Blanket Wafer |
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ChampiAn
reads wafer data from KLA-Tencor
F5 and CDE Resmap.
Mesured data also can be loaded through either user edited spread
sheet file or manual input. |
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Graphs
for individual wafer's surface are Line scan, Contour
plot and 3D surface. Wafer surface information is derived
by interpolation.
Like patterned wafer analysis, 2D graphs are also providing comparison
between processes, polish times and wafers.
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Line
scan
This graph shows cross sectional view of wafer surface with given
angle. User can change angle. |
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Contour
Plot
Tow
types of contour plot - line contour and color contour - provided.
Color contour plot is same as top view of 3D surface.
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Line
contour plot
Line contour plot connects data points with same values. |
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Color
contour plot
In color contour plot, areas of same color have same values. This
graph shows
top view of 3D surface. |
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3D
Surface
This graph shows wafer surface in 3D. User can change view points
using sliders on the side and bottom of graph. |
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