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Products
& Services
Test
Wafers
Analysis
Software
>
ChampiAn
>
ChampiSim
Metrology
Service
Defect
Characterization
&
E-Testing
Services
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ChampiAn
- Analysis
FlexiGraph |
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After
all measurement data have been loaded, everything is in place to display
the results of the experiment and analyze the data for significant
trends. The analysis process consists of selecting wafers and factors
to compare by plotting graphically so that significant results are
visibly evident.
Analysis results graphs also can be converted to data tables. |
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Line
Graph
Line graph is useful to compare trends. ChampiAn
provides various combinations of X axis and series, according to
the Y axis data user selects. Data can be analyzed by site, die,
wafer, density, polish time, field oxide loss(100% density area)
and user given factors. Factors are any items that user want to
group and analyze wafers by, such as slurries, pads, down forces
and processes.
With provided graph options, user can show/hide any data points,
lines and graph elements, change data range to show and modify the
appearance of graphs.
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Double
Y Axes Graph
If user wants to compare 2 different sets of data, double Y axes graph
is a good solution. User can specify and treat each Y axis data independently.
Following graph shows Removal Rate in left Y axis and Planarization
Efficiency in right Y axis. |
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Contour
Plot
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Two
types of contour plot - Line contour and Color contour - provided.
While line contour plot connects data points with same values, in
color contour plot area of same color has same values. Color contour
plot is same as top view of 3D surface.
While color contour plot is used for either patterned or blanket wafers,
line contour plot is used for blanket wafer only. |
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Line
Contour Plot
shows blanket wafer surface |
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Color
Contour Plot
shows wafer surface for blanket wafers or die surface for patterned
wafers
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3D
Surface
This graph shows wafer surface (blanket wafer) or die surface (patterned
wafer) in 3D. User can change view points using sliders on the side
and bottom of graph. |
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SKW
Associates, Inc.
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