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Products
& Services
Test
Wafers
Analysis
Software
>
ChampiAn
>
ChampiSim
Metrology
Service
Defect
Characterization
&
E-Testing
Services
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Building
on the CMP research and models developed at MIT, SKW has created its
own CMP process analysis software ChampiAn
which includes Oxide, STI and metal CMP process modules. |
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SKW's
ultimate goal is to create a comprehensive CMP software toolset:
ChampiAn
for model based production analysis
ChampiSim
for CMP simulation
ChampiDF
for layout modification and improvement
ChampiPC
for process control on chip production lines.
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