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SKW 3 Metrology Guideline
General Guideline for Optical Measurement Sites
There are several different sampling plans to effectively characterize the CMP process at hand with varying degrees of quality and efficiency.

Generally, we recommend that first sampling plan with three dies to any customer who performs the measurements manually (e.g. Nanospec Manual Optical Measurement tool).

For those using automated tools (e.g. Thermawave Opti-Probe or KLA/Tencor UV1250, P-Series), we recommend the second sampling plan (medium quality) with eight sites in the up and 7 sites in the down regions measured on five dies.

We have found that this plan provides the best trade-off between quality and efficiency (time and cost) to our customers. The remaining plan is largely for those interested in very detailed measurements of the wafers.
Manual Measurement Plan - 6 Up and 6 Down Sites on 3 Dies
Automated Medium Quality Plan - 8 Up Sites and 7 Down Sites on 5 Dies
Automated High Quality Plan - 24 Up Sites and 24 Down Sites on 5 Dies
Up / Down site (Cross Sectional View)
Manual Measurement Sampling Plan top
Site Information for Manual Measurement Plan
Site # Up Area Down Area Site
Density
(%) 		Pitch
(um)
X (um) Y (um) X (um) Y (um)
1 5997 18000 6048 18000 10 -
2 13940 14000 14035 14000 90 -
3 2015 10000 2065 10000 50 -
4 2000 6000 2050 6000 50 1
5 10005 6000 10050 6000 50 20
6 2000 2000 2050 2000 50 2
* X, Y coordinates are relavant to lower left corner of each die.
* Site numbers proceed from left to right and up to down sturctures.
Automated Medium Quality Measurement Sampling Plan top
Locations for Medium Quality Measurement Plan
Site # Up Area Down Area Site
Density
(%) 		Pitch
(um)
X (um) Y (um) X (um) Y (um)
1 5997 18000 6048 18000 10 -
2 13925 18000 13975 18000 70 -
3 13940 14000 14035 14000 90 -
4 2015 10000 2065 10000 50 -
5 10005 10000 10055 10000 30 -
6 10005 6000 10055 6000 50 20
7 14045 2000 14145 2000 50 200
8 2055 14000 100  
* X, Y coordinates are relavant to lower left corner of each die.
* Site numbers proceed from left to right and up to down sturctures except 100% structure.
* Site 8 has 100% percent density, so there is only up area.
Automated High Quality Measurement Sampling Plan top
Locations for High Quality Measurement Plan
Site # Up Area Down Area Site
Density
(%) 		Pitch
(um)
X (um) Y (um) X (um) Y (um)
1 2035 18025 2035 18075 50 -
2 5997 18000 6048 18000 10 -
3 10030 18000 10130 18000 80 -
4 13925 18000 13975 18000 70 -
5 18015 18000 18065 18000 50 -
6 6000 14000 6055 14000 20 -
7 13940 14000 14035 14000 90 -
8 18010 14000 18060 14000 30 -
9 2015 10000 2065 10000 50 -
10 6015 10000 6065 10000 40 -
11 10005 10000 10055 10000 30 -
12 13925 10000 13970 10000 60 -
13 18035 10025 18035 10075 50 -
14 2000 6000 2050 6000 50 1
15 6000 6000 6045 6000 50 5
16 10005 6000 10055 6000 50 20
17 14015 6000 14070 6000 50 100
18 18125 6000 18370 6000 50 500
19 2000 2000 2050 2000 50 2
20 6000 2000 6045 2000 50 10
21 10005 2000 10060 2000 50 50
22 14045 2000 14145 2000 50 200
23 18245 2000 18745 2000 50 1000
24 2055 14000 2055 14000 100 -
24 10000 14000 10000 14000 0 -
* X, Y coordinates are relavant to lower left corner of each die.
* Site numbers proceed from left to right and up to down sturctures except 100% & 0% structures.
* There is neither Up nor Down area for 100% and 0% sites. So both are measured at the same location.
General Guide for Step Height Measurement top

* All sites are pitch structures with pitch of 2, 5, 10, 20, 100, 200 um.

 
 
 
SKW Associates, Inc.