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Products
& Services
Test
Wafers
Analysis
Software
Metrology
Service
Defect
Characterization
&
E-Testing
Services
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Measurement
Plans
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Dielectric Wafers
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Wafer
Type |
Thickness |
Profile |
Details |
| Manual |
Mid
Quality |
High
Quality |
SKW1
SKW1-1 |
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3
or 5 Dies
5 Up/5 Down Sites |
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2
Dies
2 Sites |
contact
SKW |
| SKW7 |
3
or 5 Dies
3 Up/3 Down
Sites |
3
or 5 Dies
8 Up/8 Down
Sites |
3
or 5 Dies
22 Up/22 Down Sites |
2
Dies
4 Sites |
more... |
| SKW7-2
|
3
3 Up/3 Down
Sites |
5
Dies
9 Up/8 Down
Sites |
5
Dies
22 Up/22 Down Sites |
2
Dies
4 Sites |
more... |
SKW7-3
(300mm) |
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9
Dies
8 Up/8 Down Sites
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9
Dies
22 Up/22 Down Sites |
9
Dies
2 Sites |
contact
SKW |
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Notes
:
1. To calculate Planarization Length, at least mid-quality plan
is required.
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STI
Wafer |
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Wafer
Type |
Thickness |
Profile |
Details |
| Manual |
Mid
Quality |
High
Quality |
| SKW
3 |
3
Dies
6 Up/6 Down Sites |
5 Dies
8 Up/7 Down Sites |
5
Dies
24 Up/24 Down Sites |
5
Dies
6 Sites |
more... |
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Tungsten
Wafers
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Wafer
Type |
Manual |
Mid
Quality |
High
Quality |
Details |
| Optical |
Profile |
Optical |
Profile |
Optical |
Profile |
| SKW
5 |
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contact
SKW |
| SKW
5-3 |
1
Sites
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7
Scans
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9
Sites |
14
Scans |
9
Sites |
23
Scans |
more... |
| on
1 or 3 Dies |
on
3 or 5 Dies |
on
3 or 5 Dies |
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Copper
Wafer |
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Wafer
Type
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Manual
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Mid
Quality
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High
Quality
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Details
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Optical
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Profile
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Optical
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Profile
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Optical
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Profile
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SKW
6-3
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1
Sites
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7
Scans
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9
Sites
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15
Scans
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9
Sites
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23
Scans
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on
1 or 3 Dies
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on
3 or 5 Dies
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on
3 or 5 Dies
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